Inventor
PADMABANDU GAMARALALAGE G
US10 patents
⚠️ This page may combine multiple inventors who share the name “PADMABANDU GAMARALALAGE G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
7 patentsUS6128323AOct 3, 2000
Reliable modular production quality narrow-band high REP rate excimer laser
CYMER INC284 citations99
US6721340B1Apr 13, 2004
Bandwidth control technique for a laser
CYMER INC114 citations97
US6392743B1May 21, 2002
Control technique for microlithography lasers
CYMER INC64 citations95
US6320892B1Nov 20, 2001
Energy efficient lithography laser
CYMER INC21 citations92
US6061129AMay 9, 2000
Compact high resolution grating spectrometer
CYMER INC35 citations92
US6882674B2Apr 19, 2005
Four KHz gas discharge laser system
CYMER INC31 citations90
US7079556B2Jul 18, 2006
Bandwidth control technique for a laser
CYMER INC3 citations62