Inventor
JENKINS RICHARD J
US5 patents
⚠️ This page may combine multiple inventors who share the name “JENKINS RICHARD J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR PROD & CHEM
2 patentsPLANAR SOLUTIONS LLC
2 patentsUS6749488B2Jun 15, 2004
Chemical mechanical polishing slurry composition for polishing conductive and non-conductive layers on semiconductor wafers
PLANAR SOLUTIONS LLC24 citations86
US6776696B2Aug 17, 2004
Continuous chemical mechanical polishing process for polishing multiple conductive and non-conductive layers on semiconductor wafers
PLANAR SOLUTIONS LLC12 citations71