Inventor
MUKOYAMA MASAHIRO
JP4 patents
Patents
4 patentsUS7275553B2Oct 2, 2007
Liquid processing apparatus and liquid processing method
TOKYO ELECTRON LTD22 citations91
US7063094B2Jun 20, 2006
Substrate processing apparatus
TOKYO ELECTRON LTD11 citations82
US7354484B2Apr 8, 2008
Liquid processing apparatus and liquid processing method
TOKYO ELECTRON LTD7 citations72
US7472713B2Jan 6, 2009
Substrate processing apparatus
TOKYO ELECTRON LTD4 citations60