Inventor
NANBA HIROMITSU
JP17 patents
⚠️ This page may combine multiple inventors who share the name “NANBA HIROMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUS8043467B2Oct 25, 2011
Liquid processing apparatus and liquid processing method
TOKYO ELECTRON LTD21 citations92
US7275553B2Oct 2, 2007
Liquid processing apparatus and liquid processing method
TOKYO ELECTRON LTD22 citations91
US7998308B2Aug 16, 2011
Liquid processing apparatus
TOKYO ELECTRON LTD16 citations84
US7793610B2Sep 14, 2010
Liquid processing apparatus
TOKYO ELECTRON LTD8 citations84
US7927429B2Apr 19, 2011
Substrate cleaning method, substrate cleaning apparatus and computer readable recording medium
TOKYO ELECTRON LTD7 citations83
US10490424B2Nov 26, 2019
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD2 citations72
US7354484B2Apr 8, 2008
Liquid processing apparatus and liquid processing method
TOKYO ELECTRON LTD7 citations72
US8051862B2Nov 8, 2011
Liquid processing apparatus and liquid processing method
TOKYO ELECTRON LTD4 citations63
US8043440B2Oct 25, 2011
Cleaning apparatus and method and computer readable medium
TOKYO ELECTRON LTD2 citations62
US7699939B2Apr 20, 2010
Substrate cleaning method
TOKYO ELECTRON LTD4 citations62
US10403518B2Sep 3, 2019
Substrate processing method, substrate processing apparatus and recording medium
TOKYO ELECTRON LTD1 citations59
US10431448B2Oct 1, 2019
Wet etching method, substrate liquid processing apparatus, and storage medium
TOKYO ELECTRON LTD0 citations41
US7749333B2Jul 6, 2010
Substrate processing apparatus and method
TOKYO ELECTRON LTD0 citations41
NANBA HIROMITSU
3 patentsUS8479753B2Jul 9, 2013
Liquid processing apparatus and method
NANBA HIROMITSU7 citations82
US8113221B2Feb 14, 2012
Substrate cleaning method, substrate cleaning apparatus and computer readable recording medium
NANBA HIROMITSU10 citations82
US8152933B2Apr 10, 2012
Substrate processing apparatus, substrate processing method, and drain cup cleaning method
NANBA HIROMITSU2 citations61