Inventor
CHAPMAN HENRY N
US11 patents
⚠️ This page may combine multiple inventors who share the name “CHAPMAN HENRY N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV CALIFORNIA
5 patentsUS5973826AOct 26, 1999
Reflective optical imaging system with balanced distortion
UNIV CALIFORNIA65 citations95
US7050237B2May 23, 2006
High-efficiency spectral purity filter for EUV lithography
UNIV CALIFORNIA22 citations91
US6398374B1Jun 4, 2002
Condenser for ring-field deep ultraviolet and extreme ultraviolet lithography
UNIV CALIFORNIA26 citations88
US6186632B1Feb 13, 2001
Condenser for ring-field deep-ultraviolet and extreme-ultraviolet lithography
UNIV CALIFORNIA25 citations88
US7236565B2Jun 26, 2007
Tamper to delay motion and decrease ionization of a sample during short pulse x-ray imaging
UNIV CALIFORNIA0 citations49
EUV LLC
3 patentsUS6967168B2Nov 22, 2005
Method to repair localized amplitude defects in a EUV lithography mask blank
EUV LLC27 citations92
US6875543B2Apr 5, 2005
Etched-multilayer phase shifting masks for EUV lithography
EUV LLC9 citations73
US7662263B2Feb 16, 2010
Figure correction of multilayer coated optics
EUV LLC0 citations51