Inventor
TASKAR MARK
US23 patents
⚠️ This page may combine multiple inventors who share the name “TASKAR MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
12 patentsUS7806143B2Oct 5, 2010
Flexible manifold for integrated gas system gas panels
LAM RES CORP28 citations92
US7784496B2Aug 31, 2010
Triple valve inlet assembly
LAM RES CORP12 citations84
US10943769B2Mar 9, 2021
Gas distributor and flow verifier
LAM RES CORP6 citations83
US10128087B2Nov 13, 2018
Configuration independent gas delivery system
LAM RES CORP8 citations83
US10022689B2Jul 17, 2018
Fluid mixing hub for semiconductor processing tool
LAM RES CORP15 citations83
US9090972B2Jul 28, 2015
Gas supply systems for substrate processing chambers and methods therefor
LAM RES CORP6 citations82
US9335768B2May 10, 2016
Cluster mass flow devices and multi-line mass flow devices incorporating the same
LAM RES CORP4 citations72
US9721763B2Aug 1, 2017
Systems and methods for providing gases to a process chamber
LAM RES CORP2 citations71
US10431431B2Oct 1, 2019
Gas supply delivery arrangement including a gas splitter for tunable gas flow control
LAM RES CORP6 citations68
US11532460B2Dec 20, 2022
Gas mixer
LAM RES CORP0 citations62
US7628168B2Dec 8, 2009
Optimized activation prevention assembly for a gas delivery system and methods therefor
LAM RES CORP2 citations62
US9704761B2Jul 11, 2017
Corrosion sensor retainer assembly apparatus and method for detecting corrosion
LAM RES CORP0 citations48
TASKAR MARK
6 patentsUS8322380B2Dec 4, 2012
Universal fluid flow adaptor
TASKAR MARK25 citations92
US8122910B2Feb 28, 2012
Flexible manifold for integrated gas system gas panels
TASKAR MARK9 citations83
US8851113B2Oct 7, 2014
Shared gas panels in plasma processing systems
TASKAR MARK8 citations82
US8720478B2May 13, 2014
Optimized activation prevention mechanism for a gas delivery system
TASKAR MARK2 citations62
US8104503B2Jan 31, 2012
Optimized activation prevention mechanism for a gas delivery system and methods therefor
TASKAR MARK0 citations51
US9175808B2Nov 3, 2015
System and method for decreasing scrubber exhaust from gas delivery panels
TASKAR MARK0 citations40
SHAREEF IQBAL
3 patentsUS8794267B2Aug 5, 2014
Gas transport delay resolution for short etch recipes
SHAREEF IQBAL17 citations79
US10002747B2Jun 19, 2018
Methods and apparatus for supplying process gas in a plasma processing system
SHAREEF IQBAL2 citations70
US9091397B2Jul 28, 2015
Shared gas panels in plasma processing chambers employing multi-zone gas feeds
SHAREEF IQBAL5 citations70