Inventor

MARCUS MATTHEW

US3 patents

⚠️ This page may combine multiple inventors who share the name “MARCUS MATTHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

1 patent

US6610980B2Aug 26, 2003

Apparatus for inspection of semiconductor wafers and masks using a low energy electron microscope with two illuminating beams

KLA TENCOR CORP42 citations90

ADOBE SYSTEMS INC

1 patent

US7877400B1Jan 25, 2011

Optimizations of XPaths

ADOBE SYSTEMS INC17 citations79

KLA TENCOR TECH CORP

1 patent

US6979819B2Dec 27, 2005

Photoelectron emission microscope for wafer and reticle inspection

KLA TENCOR TECH CORP8 citations71