P

Inventor

FARKAS JANOS

FR44 patents
⚠️ This page may combine multiple inventors who share the name “FARKAS JANOS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MOTOROLA INC

14 patents
US6037668AMar 14, 2000

Integrated circuit having a support structure

MOTOROLA INC136 citations98
US6001730ADec 14, 1999

Chemical mechanical polishing (CMP) slurry for polishing copper interconnects which use tantalum-based barrier layers

MOTOROLA INC324 citations98
US5773364AJun 30, 1998

Method for using ammonium salt slurries for chemical mechanical polishing (CMP)

MOTOROLA INC120 citations97
US6444569B2Sep 3, 2002

Method for forming a copper interconnect using a multi-platen chemical mechanical polishing (CMP) process

MOTOROLA INC60 citations95
US6313024B1Nov 6, 2001

Method for forming a semiconductor device

MOTOROLA INC81 citations95
US6274478B1Aug 14, 2001

Method for forming a copper interconnect using a multi-platen chemical mechanical polishing (CMP) process

MOTOROLA INC70 citations95
US5897375AApr 27, 1999

Chemical mechanical polishing (CMP) slurry for copper and method of use in integrated circuit manufacture

MOTOROLA INC338 citations95
US5863838AJan 26, 1999

Method for chemically-mechanically polishing a metal layer

MOTOROLA INC62 citations95
US6096652AAug 1, 2000

Method of chemical mechanical planarization using copper coordinating ligands

MOTOROLA INC69 citations94
US5935871AAug 10, 1999

Process for forming a semiconductor device

MOTOROLA INC47 citations92
US6573173B2Jun 3, 2003

Method for forming a copper interconnect using a multi-platen chemical mechanical polishing (CMP) process

MOTOROLA INC23 citations91
US6204169B1Mar 20, 2001

Processing for polishing dissimilar conductive layers in a semiconductor device

MOTOROLA INC42 citations91
US5710069AJan 20, 1998

Measuring slurry particle size during substrate polishing

MOTOROLA INC61 citations91
US5928962AJul 27, 1999

Process for forming a semiconductor device

MOTOROLA INC12 citations72

FARKAS JANOS

9 patents

ERICSSON TELEFON AB L M

6 patents

FREESCALE SEMICONDUCTOR INC

6 patents

NXP BV

2 patents

NAT SEMICONDUCTOR CORP

1 patent

SEMATECH INC

1 patent

LUNDH PETER

1 patent

AMD INC

1 patent

MONNOYER PHILIPPE

1 patent

ANSALDO ENERGIA IP UK LTD

1 patent

CALVO-MUNOZ MARIA LUISA

1 patent