Inventor

KLEINKE STEVE

US6 patents

⚠️ This page may combine multiple inventors who share the name “KLEINKE STEVE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

2 patents

US6405101B1Jun 11, 2002

Wafer centering system and method

NOVELLUS SYSTEMS INC134 citations96

US7477948B1Jan 13, 2009

Apparatus and methods for precompiling program sequences for wafer processing

NOVELLUS SYSTEMS INC7 citations71

BLONIGAN WENDELL THOMAS

2 patents

US8444364B2May 21, 2013

Auto-sequencing multi-directional inline processing apparatus

BLONIGAN WENDELL THOMAS17 citations89

US8672603B2Mar 18, 2014

Auto-sequencing inline processing apparatus

BLONIGAN WENDELL THOMAS4 citations69

ORBOTECH LT SOLAR LLC

1 patent

US9287152B2Mar 15, 2016

Auto-sequencing multi-directional inline processing method

ORBOTECH LT SOLAR LLC4 citations70

JAIN JAIDEEP

1 patent

US8082044B2Dec 20, 2011

Apparatus and methods for precompiling program sequences processing for wafer processing

JAIN JAIDEEP1 citations44