Inventor
TOMINE TETSU
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TOMINE TETSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEIKO EPSON CORP
5 patentsUS7826916B2Nov 2, 2010
Method and system for controlling semiconductor manufacturing equipment
SEIKO EPSON CORP6 citations69
US7684903B2Mar 23, 2010
Method and system for controlling semiconductor manufacturing apparatus
SEIKO EPSON CORP7 citations69
US7937189B2May 3, 2011
Method and system for controlling semiconductor manufacturing equipment
SEIKO EPSON CORP2 citations58
US7853347B2Dec 14, 2010
Semiconductor manufacturing system, controller, semiconductor manufacturing system control method, and processing liquid collection method
SEIKO EPSON CORP0 citations49
US7885728B2Feb 8, 2011
Method and system for controlling semiconductor manufacturing apparatus
SEIKO EPSON CORP0 citations48