Inventor
KIM CHAEHO
KR12 patents
⚠️ This page may combine multiple inventors who share the name “KIM CHAEHO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
6 patentsUS9130054B2Sep 8, 2015
Semiconductor memory devices and methods of fabricating the same
SAMSUNG ELECTRONICS CO LTD29 citations93
US11532639B2Dec 20, 2022
Three-dimensional semiconductor memory device
SAMSUNG ELECTRONICS CO LTD2 citations72
US9893082B2Feb 13, 2018
Semiconductor memory device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD4 citations72
US8980731B2Mar 17, 2015
Methods of forming a semiconductor device
SAMSUNG ELECTRONICS CO LTD6 citations72
US10109747B2Oct 23, 2018
Semiconductor memory devices and methods of fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations51
US10208397B2Feb 19, 2019
Apparatus for depositing a thin film
SAMSUNG ELECTRONICS CO LTD0 citations36
TOKYO ELECTRON LTD
4 patentsUS7758920B2Jul 20, 2010
Method and apparatus for forming silicon-containing insulating film
TOKYO ELECTRON LTD81 citations98
US7462571B2Dec 9, 2008
Film formation method and apparatus for semiconductor process for forming a silicon nitride film
TOKYO ELECTRON LTD91 citations98
US8343594B2Jan 1, 2013
Film formation method and apparatus for semiconductor process
TOKYO ELECTRON LTD8 citations83
US7959733B2Jun 14, 2011
Film formation apparatus and method for semiconductor process
TOKYO ELECTRON LTD1 citations52