Inventor
FU CHIEN-CHUNG
TW12 patents
⚠️ This page may combine multiple inventors who share the name “FU CHIEN-CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS6809028B2Oct 26, 2004
Chemistry for liner removal in a dual damascene process
TAIWAN SEMICONDUCTOR MFG22 citations92
US7217663B2May 15, 2007
Via hole and trench structures and fabrication methods thereof and dual damascene structures and fabrication methods thereof
TAIWAN SEMICONDUCTOR MFG7 citations73
US7538025B2May 26, 2009
Dual damascene process flow for porous low-k materials
TAIWAN SEMICONDUCTOR MFG3 citations62
US7436009B2Oct 14, 2008
Via structures and trench structures and dual damascene structures
TAIWAN SEMICONDUCTOR MFG0 citations51
NAT UNIV TSING HUA
4 patentsUS7947430B2May 24, 2011
Method of forming 3D micro structures with high aspect ratios
NAT UNIV TSING HUA12 citations82
US8659825B2Feb 25, 2014
Sample carrying apparatus capable of revolving sample
NAT UNIV TSING HUA2 citations61
US7906273B2Mar 15, 2011
Method of manufacturing hollow micro-needle structures
NAT UNIV TSING HUA0 citations50
US9025133B2May 5, 2015
Laser interference lithography apparatus using fiber as spatial filter and beam expander
NAT UNIV TSING HUA0 citations27