Inventor
ONO KAZUYUKI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “ONO KAZUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ONO KAZUYUKI
5 patentsUS8314485B2Nov 20, 2012
Electronic component
ONO KAZUYUKI12 citations82
US8338950B2Dec 25, 2012
Electronic component
ONO KAZUYUKI3 citations61
US8274797B2Sep 25, 2012
Electronic component
ONO KAZUYUKI2 citations61
US9363617B2Jun 7, 2016
Semiconductor device having a base, a cavity, a diaphragm, and a substrate
ONO KAZUYUKI0 citations50
US8547518B2Oct 1, 2013
Stage base, stage apparatus, exposure apparatus, and device manufacturing method
ONO KAZUYUKI1 citations50