Inventor
WALLIS MIKE
US5 patents
⚠️ This page may combine multiple inventors who share the name “WALLIS MIKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS6457199B1Oct 1, 2002
Substrate processing in an immersion, scrub and dry system
LAM RES CORP64 citations95
US6247197B1Jun 19, 2001
Brush interflow distributor
LAM RES CORP48 citations92
US6637446B2Oct 28, 2003
Integrated substrate processing system
LAM RES CORP44 citations91
US6464796B2Oct 15, 2002
Methods for applying fluid through a brush interflow distributor
LAM RES CORP17 citations89