Inventor

FAIRHURST JOHN ROBERT

US5 patents

⚠️ This page may combine multiple inventors who share the name “FAIRHURST JOHN ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FAIRHURST JOHN ROBERT

4 patents

US8585115B2Nov 19, 2013

Method and apparatus for lifting a horizontally-oriented substrate from a cassette

FAIRHURST JOHN ROBERT6 citations68

US8550520B2Oct 8, 2013

Method and apparatus for manipulating a substrate

FAIRHURST JOHN ROBERT2 citations58

US9218990B2Dec 22, 2015

Method and apparatus for holding a plurality of substrates for processing

FAIRHURST JOHN ROBERT1 citations47

US9070730B2Jun 30, 2015

Method and apparatus for removing a vertically-oriented substrate from a cassette

FAIRHURST JOHN ROBERT0 citations37

KRAMPERT JEFFREY E

1 patent

US9520264B2Dec 13, 2016

Method and apparatus for clamping and cooling a substrate for ion implantation

KRAMPERT JEFFREY E0 citations31