Inventor
KRAMPERT JEFFREY E
US14 patents
⚠️ This page may combine multiple inventors who share the name “KRAMPERT JEFFREY E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
4 patentsUS9865433B1Jan 9, 2018
Gas injection system for ion beam device
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations71
US9417138B2Aug 16, 2016
Gas coupled probe for substrate temperature measurement
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations61
US10974276B2Apr 13, 2021
Hydrophobic shafts for use in process chambers
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations56
US10569299B2Feb 25, 2020
Hydrophobic shafts for use in process chambers
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations56
FAIRHURST JOHN ROBERT
4 patentsUS8585115B2Nov 19, 2013
Method and apparatus for lifting a horizontally-oriented substrate from a cassette
FAIRHURST JOHN ROBERT6 citations68
US8550520B2Oct 8, 2013
Method and apparatus for manipulating a substrate
FAIRHURST JOHN ROBERT2 citations58
US9218990B2Dec 22, 2015
Method and apparatus for holding a plurality of substrates for processing
FAIRHURST JOHN ROBERT1 citations47
US9070730B2Jun 30, 2015
Method and apparatus for removing a vertically-oriented substrate from a cassette
FAIRHURST JOHN ROBERT0 citations37
VARIAN SEMICONDUCTOR EQUIPMENT
3 patentsUS7977652B2Jul 12, 2011
Optical heater for cryogenic ion implanter surface regeneration
VARIAN SEMICONDUCTOR EQUIPMENT4 citations61
US9212949B2Dec 15, 2015
Technique for temperature measurement and calibration of semiconductor workpieces using infrared
VARIAN SEMICONDUCTOR EQUIPMENT0 citations51
US9175710B2Nov 3, 2015
Contained ceramic fastener
VARIAN SEMICONDUCTOR EQUIPMENT1 citations49