Inventor

SAKAIDA DARYL

US3 patents

⚠️ This page may combine multiple inventors who share the name “SAKAIDA DARYL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STEWART ROBERT E

1 patent

US9229026B2Jan 5, 2016

Accelerometer systems and methods

STEWART ROBERT E3 citations68

NORTHROP GRUMMAN SYSTEMS CORP

1 patent

US8007166B2Aug 30, 2011

Method for optimizing direct wafer bond line width for reduction of parasitic capacitance in MEMS accelerometers

NORTHROP GRUMMAN SYSTEMS CORP2 citations55

ABBINK HENRY C

1 patent

US8579502B2Nov 12, 2013

Method for determining leak rate through a bond line of a MEMS device

ABBINK HENRY C1 citations42