Inventor
ANZAI SATORU
JP10 patents
⚠️ This page may combine multiple inventors who share the name “ANZAI SATORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIPPON KOGAKU KK
6 patentsUS4734746AMar 29, 1988
Exposure method and system for photolithography
NIPPON KOGAKU KK72 citations96
US4666273AMay 19, 1987
Automatic magnification correcting system in a projection optical apparatus
NIPPON KOGAKU KK132 citations95
US4624551ANov 25, 1986
Light irradiation control method for projection exposure apparatus
NIPPON KOGAKU KK31 citations92
US4592625AJun 3, 1986
Double-conjugate maintaining optical system
NIPPON KOGAKU KK35 citations92
US4498762AFeb 12, 1985
Projection type exposure apparatus
NIPPON KOGAKU KK14 citations73
US4037943AJul 26, 1977
Reflection type image forming optical system having a large angle of view
NIPPON KOGAKU KK16 citations73
NIKON CORP
4 patentsUS4871237AOct 3, 1989
Method and apparatus for adjusting imaging performance of projection optical apparatus
NIKON CORP88 citations94
US4883345ANov 28, 1989
Projection optical apparatus
NIKON CORP26 citations92
US5682226AOct 28, 1997
Photomask, an exposure method and a projection exposure apparatus
NIKON CORP18 citations91
US5592259AJan 7, 1997
Photomask, an exposure method and a projection exposure apparatus
NIKON CORP9 citations72