P

Inventor

MURAKAMI EIICHI

JP64 patents
⚠️ This page may combine multiple inventors who share the name “MURAKAMI EIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

17 patents
US4929893AMay 29, 1990

Wafer prober

CANON KK206 citations98
US5751404AMay 12, 1998

Exposure apparatus and method wherein alignment is carried out by comparing marks which are incident on both reticle stage and wafer stage reference plates

CANON KK54 citations96
US5017798AMay 21, 1991

Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces

CANON KK57 citations96
US4886975ADec 12, 1989

Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces

CANON KK44 citations96
US6962825B2Nov 8, 2005

Exposure apparatus

CANON KK20 citations93
US5594549AJan 14, 1997

Position detecting method and projection exposure apparatus using the same

CANON KK23 citations93
US4795911AJan 3, 1989

Surface examining apparatus for detecting the presence of foreign particles on the surface

CANON KK54 citations93
US6633362B2Oct 14, 2003

Projection exposure apparatus

CANON KK28 citations92
US6614535B1Sep 2, 2003

Exposure apparatus with interferometer

CANON KK33 citations92
US5695897ADec 9, 1997

Alignment method and semiconductor exposure method

CANON KK48 citations92
US4934064AJun 19, 1990

Alignment method in a wafer prober

CANON KK46 citations92
US7236254B2Jun 26, 2007

Exposure apparatus with interferometer

CANON KK8 citations73
US7023561B2Apr 4, 2006

Exposure apparatus with interferometer

CANON KK7 citations73
US6795161B2Sep 21, 2004

Exposure apparatus, method of manufacturing semiconductor devices and plant therefor

CANON KK11 citations73
US7046330B2May 16, 2006

Exposure apparatus

CANON KK4 citations63
US6826442B2Nov 30, 2004

Stocker, exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method

CANON KK4 citations63
US6611376B1Aug 26, 2003

Diffractive optical element and method of manufacturing the same

CANON KK5 citations63

HITACHI LTD

16 patents
US6099598AAug 8, 2000

Fabrication system and fabrication method

HITACHI LTD99 citations99
US5820679AOct 13, 1998

Fabrication system and method having inter-apparatus transporter

HITACHI LTD144 citations99
US5241197AAug 31, 1993

Transistor provided with strained germanium layer

HITACHI LTD188 citations98
US5858863AJan 12, 1999

Fabrication system and method having inter-apparatus transporter

HITACHI LTD63 citations96
US5562800AOct 8, 1996

Wafer transport method

HITACHI LTD69 citations96
US5416331AMay 16, 1995

Surface atom fabrication method and apparatus

HITACHI LTD69 citations96
US4683838AAug 4, 1987

Plasma treatment system

HITACHI LTD85 citations96
US6953728B2Oct 11, 2005

Semiconductor device and method of manufacturing thereof

HITACHI LTD17 citations92
US6727146B2Apr 27, 2004

Semiconductor device and method of manufacturing thereof

HITACHI LTD17 citations92
US5689494ANov 18, 1997

Surface atom fabrication method and apparatus

HITACHI LTD22 citations92
US5601686AFeb 11, 1997

Wafer transport method

HITACHI LTD26 citations92
US4808546AFeb 28, 1989

SOI process for forming a thin film transistor using solid phase epitaxy

HITACHI LTD37 citations92
US5543356AAug 6, 1996

Method of impurity doping into semiconductor

HITACHI LTD23 citations86
US4984048AJan 8, 1991

Semiconductor device with buried side contact

HITACHI LTD20 citations82
US6677194B2Jan 13, 2004

Method of manufacturing a semiconductor integrated circuit device

HITACHI LTD11 citations74
US5338942AAug 16, 1994

Semiconductor projections having layers with different lattice constants

HITACHI LTD14 citations74

RENESAS TECH CORP

6 patents

MURAKAMI EIICHI

3 patents

TEIJIN LTD

2 patents

ATSUDEN CO LTD

2 patents

RALLY MASTER CO LTD

1 patent

NITTO KOGYO KK

1 patent

AGENCY IND SCIENCE TECHN

1 patent

RYUSOK CO LTD

1 patent

Showing the top 50 of 64 patents by PatentIndex Score.