Inventor
KOHNO MICHIO
JP32 patents
Patents
32 patentsUS5774575AJun 30, 1998
Inspection apparatus, and exposure apparatus and device manufacturing method using the inspection apparatus
CANON KK80 citations96
US5585916ADec 17, 1996
Surface inspecting device
CANON KK64 citations96
US5528360AJun 18, 1996
Surface-condition inspection apparatus
CANON KK60 citations96
US5381225AJan 10, 1995
Surface-condition inspection apparatus
CANON KK58 citations96
US5359407AOct 25, 1994
Optical scanning apparatus, surface-state inspection apparatus and exposure apparatus
CANON KK61 citations96
US5162867ANov 10, 1992
Surface condition inspection method and apparatus using image transfer
CANON KK53 citations96
US5017798AMay 21, 1991
Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces
CANON KK57 citations96
US4886975ADec 12, 1989
Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces
CANON KK44 citations96
US4871257AOct 3, 1989
Optical apparatus for observing patterned article
CANON KK56 citations96
US4653903AMar 31, 1987
Exposure apparatus
CANON KK76 citations96
US5591985AJan 7, 1997
Surface state inspecting system including a scanning optical system for scanning a surface to be inspected with a first light and for simultaneously scanning a diffraction grating with a second light
CANON KK27 citations93
US4831274AMay 16, 1989
Surface inspecting device for detecting the position of foreign matter on a substrate
CANON KK42 citations93
US4795911AJan 3, 1989
Surface examining apparatus for detecting the presence of foreign particles on the surface
CANON KK54 citations93
US6999157B2Feb 14, 2006
Illumination optical system and method, and exposure apparatus
CANON KK39 citations92
US6603530B1Aug 5, 2003
Exposure apparatus that illuminates a mark and causes light from the mark to be incident on a projection optical system
CANON KK33 citations92
US5652657AJul 29, 1997
Inspection system for original with pellicle
CANON KK44 citations92
US5581348ADec 3, 1996
Surface inspecting device using bisected multi-mode laser beam and system having the same
CANON KK46 citations92
US5399867AMar 21, 1995
Foreign particle inspection apparatus
CANON KK21 citations92
US4999511AMar 12, 1991
Surface state inspecting device for inspecting the state of parallel first and second surfaces
CANON KK34 citations92
US4705940ANov 10, 1987
Focus detection in a projection optical system
CANON KK34 citations92
US5963316AOct 5, 1999
Method and apparatus for inspecting a surface state
CANON KK32 citations91
US5105092AApr 14, 1992
Inspecting apparatus having a detection sensitivity controller means
CANON KK23 citations87
US7292316B2Nov 6, 2007
Illumination optical system and exposure apparatus having the same
CANON KK15 citations84
US6857764B2Feb 22, 2005
Illumination optical system and exposure apparatus having the same
CANON KK16 citations84
US4865455ASep 12, 1989
Optical device having a variable geometry filter usable for aligning a mask or reticle with a wafer
CANON KK22 citations82
US5602639AFeb 11, 1997
Surface-condition inspection method and apparatus including a plurality of detecting elements located substantially at a pupil plane of a detection optical system
CANON KK8 citations74
US5581089ADec 3, 1996
Apparatus and method for inspecting a reticle for color centers
CANON KK12 citations74
US5448350ASep 5, 1995
Surface state inspection apparatus and exposure apparatus including the same
CANON KK19 citations74
US7079220B2Jul 18, 2006
Illumination optical system and method, and exposure apparatus
CANON KK0 citations52
US6833905B2Dec 21, 2004
Illumination apparatus, projection exposure apparatus, and device fabricating method
CANON KK0 citations52
US6621061B2Sep 16, 2003
Exposure method and device manufacturing method using the same
CANON KK0 citations52
US4830499AMay 16, 1989
Optical device capable of maintaining pupil imaging
CANON KK1 citations52