Inventor
UEHARA NAOYASU
JP4 patents
Patents
4 patentsUS9613791B2Apr 4, 2017
Calcium fluoride optical member, manufacturing method therefor, gas-holding container, and light source device
NIKON CORP0 citations43
US10074523B2Sep 11, 2018
Polycrystalline CaF2 member, member for plasma treatment device, plasma treatment device, and method for producing focusing ring
NIKON CORP0 citations42
US9580331B2Feb 28, 2017
CaF2 polycrystalline body, focus ring, plasma processing apparatus, and method for producing CaF2 polycrystalline body
NIKON CORP0 citations42
US10458042B2Oct 29, 2019
Calcium fluoride member, method for producing same, and method for pressure-bonding calcium fluoride crystal
NIKON CORP0 citations39