Inventor
ELINGS WOUTER LODEWIJK
TW5 patents
Patents
5 patentsUS10317191B2Jun 11, 2019
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV4 citations82
US9594029B2Mar 14, 2017
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV4 citations81
US10996176B2May 4, 2021
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV2 citations71
US10746668B2Aug 18, 2020
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV2 citations71
US11977034B2May 7, 2024
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV0 citations61