Inventor
VAN BILSEN FRANCISCUS BERNARDUS MARIA
NL13 patents
⚠️ This page may combine multiple inventors who share the name “VAN BILSEN FRANCISCUS BERNARDUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
11 patentsUS7880880B2Feb 1, 2011
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV24 citations95
US10317191B2Jun 11, 2019
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV4 citations82
US9594029B2Mar 14, 2017
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV4 citations81
US7626701B2Dec 1, 2009
Lithographic apparatus with multiple alignment arrangements and alignment measuring method
ASML NETHERLANDS BV7 citations72
US10996176B2May 4, 2021
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV2 citations71
US10746668B2Aug 18, 2020
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV2 citations71
US11977034B2May 7, 2024
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV0 citations61
US8018594B2Sep 13, 2011
Lithographic apparatus with multiple alignment arrangements and alignment measuring method
ASML NETHERLANDS BV1 citations61
US7651825B2Jan 26, 2010
Method and system for overlay control using dual metrology sampling
ASML NETHERLANDS BV5 citations61
US8345245B2Jan 1, 2013
Lithographic apparatus with multiple alignment arrangements and alignment measuring method
ASML NETHERLANDS BV0 citations51
US7763403B2Jul 27, 2010
Method and system for overlay control using dual metrology sampling
ASML NETHERLANDS BV1 citations51