Inventor
VAN WIJNEN PAUL JACQUES
NL10 patents
⚠️ This page may combine multiple inventors who share the name “VAN WIJNEN PAUL JACQUES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS7112813B2Sep 26, 2006
Device inspection method and apparatus using an asymmetric marker
ASML NETHERLANDS BV61 citations96
US10317191B2Jun 11, 2019
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV4 citations82
US9594029B2Mar 14, 2017
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV4 citations81
US7403259B2Jul 22, 2008
Lithographic processing cell, lithographic apparatus, track and device manufacturing method
ASML NETHERLANDS BV7 citations72
US10996176B2May 4, 2021
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV2 citations71
US10746668B2Aug 18, 2020
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV2 citations71
US11977034B2May 7, 2024
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV0 citations61
US7679715B2Mar 16, 2010
Lithographic processing cell, lithographic apparatus, track and device manufacturing method
ASML NETHERLANDS BV4 citations61
US7679714B2Mar 16, 2010
Lithographic apparatus, combination of lithographic apparatus and processing module, and device manufacturing method
ASML NETHERLANDS BV0 citations49