Inventor
VERSTAPPEN LEONARDUS HENRICUS MARIE
NL13 patents
⚠️ This page may combine multiple inventors who share the name “VERSTAPPEN LEONARDUS HENRICUS MARIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS10317191B2Jun 11, 2019
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV4 citations82
US9594029B2Mar 14, 2017
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV4 citations81
US9798250B2Oct 24, 2017
Lithographic apparatus for measuring overlay error and a device manufacturing method
ASML NETHERLANDS BV2 citations72
US10996176B2May 4, 2021
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV2 citations71
US10746668B2Aug 18, 2020
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV2 citations71
US7547495B2Jun 16, 2009
Device manufacturing method and computer program product
ASML NETHERLANDS BV4 citations62
US11977034B2May 7, 2024
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV0 citations61
US7630087B2Dec 8, 2009
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV2 citations60
US12204826B2Jan 21, 2025
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV0 citations59
US11580274B2Feb 14, 2023
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV1 citations59