Inventor
JUNGBLUT REINER MARIA
TW17 patents
⚠️ This page may combine multiple inventors who share the name “JUNGBLUT REINER MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
15 patentsUS10133191B2Nov 20, 2018
Method for determining a process window for a lithographic process, associated apparatuses and a computer program
ASML NETHERLANDS BV8 citations84
US10990018B2Apr 27, 2021
Computational metrology
ASML NETHERLANDS BV10 citations83
US10317191B2Jun 11, 2019
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV4 citations82
US9594029B2Mar 14, 2017
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV4 citations81
US10996176B2May 4, 2021
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV2 citations71
US10746668B2Aug 18, 2020
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV2 citations71
US11347150B2May 31, 2022
Computational metrology
ASML NETHERLANDS BV2 citations70
US10558130B2Feb 11, 2020
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations70
US10274849B2Apr 30, 2019
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations70
US10324379B2Jun 18, 2019
Lithographic apparatus and method
ASML NETHERLANDS BV3 citations67
US11126093B2Sep 21, 2021
Focus and overlay improvement by modifying a patterning device
ASML NETHERLANDS BV0 citations62
US11977034B2May 7, 2024
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV0 citations61
US12189302B2Jan 7, 2025
Computational metrology
ASML NETHERLANDS BV0 citations60
US10545410B2Jan 28, 2020
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
ASML NETHERLANDS BV1 citations58
US7903234B2Mar 8, 2011
Lithographic apparatus, device manufacturing method and computer program product
ASML NETHERLANDS BV0 citations39