Inventor
SIRARD STEPHEN M
US12 patents
⚠️ This page may combine multiple inventors who share the name “SIRARD STEPHEN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS8898928B2Dec 2, 2014
Delamination drying apparatus and method
LAM RES CORP18 citations81
US11862473B2Jan 2, 2024
Controlled degradation of a stimuli-responsive polymer film
LAM RES CORP2 citations69
US10068781B2Sep 4, 2018
Systems and methods for drying high aspect ratio structures without collapse using sacrificial bracing material that is removed using hydrogen-rich plasma
LAM RES CORP4 citations66
US7981699B2Jul 19, 2011
Method for tunably repairing low-k dielectric damage
LAM RES CORP6 citations60
US12119218B2Oct 15, 2024
Sacrificial protection layer for environmentally sensitive surfaces of substrates
LAM RES CORP1 citations59
US12322588B2Jun 3, 2025
Stimulus responsive polymer films and formulations
LAM RES CORP0 citations58
US9773649B2Sep 26, 2017
Dry development and image transfer of si-containing self-assembled block copolymers
LAM RES CORP0 citations50
US9666427B2May 30, 2017
Method of collapse-free drying of high aspect ratio structures
LAM RES CORP0 citations44