Inventor
KIM WOOK-RAE
KR10 patents
⚠️ This page may combine multiple inventors who share the name “KIM WOOK-RAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
8 patentsUS10955360B2Mar 23, 2021
Structured illumination-based inspection apparatus and inspection method, and semiconductor device fabrication method including structured illumination-based inspection method
SAMSUNG ELECTRONICS CO LTD2 citations71
US9702826B2Jul 11, 2017
Method of inspecting a surface of an object and optical system for performing the same
SAMSUNG ELECTRONICS CO LTD3 citations71
US12215974B2Feb 4, 2025
Optical measurement apparatus, measuring method using the same, and method for fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US9425036B2Aug 23, 2016
Light source device and semiconductor manufacturing apparatus including the same
SAMSUNG ELECTRONICS CO LTD2 citations59
US9374883B2Jun 21, 2016
Plasma light source apparatus and plasma light generating method
SAMSUNG ELECTRONICS CO LTD2 citations59
US12345521B2Jul 1, 2025
Optical measurement apparatus, measuring method using the same, and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US9839110B2Dec 5, 2017
Plasma light source apparatus and light source system including the same
SAMSUNG ELECTRONICS CO LTD1 citations48
US9546772B2Jan 17, 2017
Rod lens for lighting apparatus, lighting apparatus including the same and semiconductor manufacturing method using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations41