P

Inventor

JEON BYEONG-HWAN

KR32 patents
⚠️ This page may combine multiple inventors who share the name “JEON BYEONG-HWAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

20 patents
US9702826B2Jul 11, 2017

Method of inspecting a surface of an object and optical system for performing the same

SAMSUNG ELECTRONICS CO LTD3 citations71
US8841824B2Sep 23, 2014

Broadband light illuminators

SAMSUNG ELECTRONICS CO LTD5 citations71
US10001444B2Jun 19, 2018

Surface inspecting method

SAMSUNG ELECTRONICS CO LTD4 citations70
US9746430B2Aug 29, 2017

Optical inspecting apparatus

SAMSUNG ELECTRONICS CO LTD4 citations70
US5159250AOct 27, 1992

Robot control method

SAMSUNG ELECTRONICS CO LTD6 citations63
US11615956B2Mar 28, 2023

Light generator including debris shielding assembly, photolithographic apparatus including the light generator

SAMSUNG ELECTRONICS CO LTD0 citations62
US11114298B2Sep 7, 2021

Light generator including debris shielding assembly, photolithographic apparatus including the light generator, and method of manufacturing integrated circuit device using the photolithographic apparatus

SAMSUNG ELECTRONICS CO LTD0 citations62
US10779388B2Sep 15, 2020

EUV generation device

SAMSUNG ELECTRONICS CO LTD1 citations62
US9425036B2Aug 23, 2016

Light source device and semiconductor manufacturing apparatus including the same

SAMSUNG ELECTRONICS CO LTD2 citations59
US9374883B2Jun 21, 2016

Plasma light source apparatus and plasma light generating method

SAMSUNG ELECTRONICS CO LTD2 citations59
US10890527B2Jan 12, 2021

EUV mask inspection apparatus and method, and EUV mask manufacturing method including EUV mask inspection method

SAMSUNG ELECTRONICS CO LTD0 citations51
US9255694B2Feb 9, 2016

Reflector structure of illumination optic system

SAMSUNG ELECTRONICS CO LTD0 citations50
US9839110B2Dec 5, 2017

Plasma light source apparatus and light source system including the same

SAMSUNG ELECTRONICS CO LTD1 citations48
US9897552B2Feb 20, 2018

Optical transformation module and optical measurement system, and method of manufacturing a semiconductor device using optical transformation module and optical measurement system

SAMSUNG ELECTRONICS CO LTD0 citations41
US9546772B2Jan 17, 2017

Rod lens for lighting apparatus, lighting apparatus including the same and semiconductor manufacturing method using the apparatus

SAMSUNG ELECTRONICS CO LTD0 citations41
US9903705B2Feb 27, 2018

Apparatus for focus control and method for manufacturing semiconductor device

SAMSUNG ELECTRONICS CO LTD0 citations39
US10473579B2Nov 12, 2019

Apparatus for inspecting material property of plurality of measurement objects

SAMSUNG ELECTRONICS CO LTD0 citations38
US10431505B2Oct 1, 2019

Method of inspecting surface having a minute pattern based on detecting light reflected from metal layer on the surface

SAMSUNG ELECTRONICS CO LTD0 citations35
US10338370B2Jul 2, 2019

Clock signal generators and substrate inspecting apparatuses having the same

SAMSUNG ELECTRONICS CO LTD0 citations35
US10733719B2Aug 4, 2020

Wafer inspection apparatus and wafer inspection method using the same

SAMSUNG ELECTRONICS CO LTD0 citations33

HYUNDAI MOBIS CO LTD

7 patents

PARK KYOUNG SOO

1 patent

KIM KWANG SOO

1 patent

PARK YOUNG-KYU

1 patent

CHEIL IND INC

1 patent

HASHIMOTO KOHEI

1 patent