Inventor
TUITJE HOLGER
US14 patents
⚠️ This page may combine multiple inventors who share the name “TUITJE HOLGER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS10978278B2Apr 13, 2021
Normal-incident in-situ process monitor sensor
TOKYO ELECTRON LTD2 citations73
US10473525B2Nov 12, 2019
Spatially resolved optical emission spectroscopy (OES) in plasma processing
TOKYO ELECTRON LTD6 citations72
US9970818B2May 15, 2018
Spatially resolved optical emission spectroscopy (OES) in plasma processing
TOKYO ELECTRON LTD5 citations72
US9059038B2Jun 16, 2015
System for in-situ film stack measurement during etching and etch control method
TOKYO ELECTRON LTD5 citations71
US9846088B2Dec 19, 2017
Differential acoustic time of flight measurement of temperature of semiconductor substrates
TOKYO ELECTRON LTD2 citations69
US12261030B2Mar 25, 2025
Normal-incidence in-situ process monitor sensor
TOKYO ELECTRON LTD0 citations62
US11961721B2Apr 16, 2024
Normal-incidence in-situ process monitor sensor
TOKYO ELECTRON LTD0 citations62
US7428044B2Sep 23, 2008
Drift compensation for an optical metrology tool
TOKYO ELECTRON LTD3 citations62
US7924422B2Apr 12, 2011
Calibration method for optical metrology
TOKYO ELECTRON LTD5 citations60
US7446888B2Nov 4, 2008
Matching optical metrology tools using diffraction signals
TOKYO ELECTRON LTD6 citations59
US7446887B2Nov 4, 2008
Matching optical metrology tools using hypothetical profiles
TOKYO ELECTRON LTD2 citations59
US7505148B2Mar 17, 2009
Matching optical metrology tools using spectra enhancement
TOKYO ELECTRON LTD1 citations52