Inventor
MIHAYLOV MIHAIL
US19 patents
⚠️ This page may combine multiple inventors who share the name “MIHAYLOV MIHAIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS7595869B1Sep 29, 2009
Optical metrology system optimized with a plurality of design goals
TOKYO ELECTRON LTD24 citations92
US7761178B2Jul 20, 2010
Automated process control using an optical metrology system optimized with design goals
TOKYO ELECTRON LTD16 citations84
US7761250B2Jul 20, 2010
Optical metrology system optimized with design goals
TOKYO ELECTRON LTD12 citations84
US10473525B2Nov 12, 2019
Spatially resolved optical emission spectroscopy (OES) in plasma processing
TOKYO ELECTRON LTD6 citations72
US9970818B2May 15, 2018
Spatially resolved optical emission spectroscopy (OES) in plasma processing
TOKYO ELECTRON LTD5 citations72
US10692705B2Jun 23, 2020
Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamber
TOKYO ELECTRON LTD5 citations71
US9059038B2Jun 16, 2015
System for in-situ film stack measurement during etching and etch control method
TOKYO ELECTRON LTD5 citations71
US7789541B2Sep 7, 2010
Method and system for lamp temperature control in optical metrology
TOKYO ELECTRON LTD2 citations62
US7595471B1Sep 29, 2009
Auto focusing of a workpiece using an array detector each with a detector identification
TOKYO ELECTRON LTD3 citations62
US10837902B2Nov 17, 2020
Optical sensor for phase determination
TOKYO ELECTRON LTD1 citations59