Inventor
ZOU HAIXING
US4 patents
⚠️ This page may combine multiple inventors who share the name “ZOU HAIXING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
3 patentsUS7408641B1Aug 5, 2008
Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system
KLA TENCOR TECH CORP20 citations91
US7869040B1Jan 11, 2011
Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system
KLA TENCOR TECH CORP6 citations72
US7190441B1Mar 13, 2007
Methods and systems for preparing a sample for thin film analysis
KLA TENCOR TECH CORP9 citations67