Inventor
OHTANI TATSUO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “OHTANI TATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU HANDOTAI KK
9 patentsUS6234879B1May 22, 2001
Method and apparatus for wafer chamfer polishing
SHINETSU HANDOTAI KK76 citations96
US5733181AMar 31, 1998
Apparatus for polishing the notch of a wafer
SHINETSU HANDOTAI KK38 citations92
US5727990AMar 17, 1998
Method for mirror-polishing chamfered portion of wafer and mirror-polishing apparatus
SHINETSU HANDOTAI KK49 citations92
US5547415AAug 20, 1996
Method and apparatus for wafer chamfer polishing
SHINETSU HANDOTAI KK25 citations92
US5476413ADec 19, 1995
Apparatus for polishing the periphery portion of a wafer
SHINETSU HANDOTAI KK52 citations92
US5317836AJun 7, 1994
Apparatus for polishing chamfers of a wafer
SHINETSU HANDOTAI KK31 citations92
US5316620AMay 31, 1994
Method and an apparatus for polishing wafer chamfers
SHINETSU HANDOTAI KK29 citations92
US5538463AJul 23, 1996
Apparatus for bevelling wafer-edge
SHINETSU HANDOTAI KK14 citations73
US5458529AOct 17, 1995
Apparatus for polishing notch portion of wafer
SHINETSU HANDOTAI KK15 citations73
OZAWA HITOSHI
3 patentsUS9574154B2Feb 21, 2017
Sheet whose lubricity is maintained under wet conditions
OZAWA HITOSHI0 citations51
US9622961B2Apr 18, 2017
Water-soluble polyalkylene oxide-modified product
OZAWA HITOSHI0 citations40
US10000629B2Jun 19, 2018
Resin composition whose lubricity under wet conditions is maintained
OZAWA HITOSHI0 citations33