Inventor
PARK JANG IK
KR10 patents
⚠️ This page may combine multiple inventors who share the name “PARK JANG IK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
5 patentsUS9417180B2Aug 16, 2016
Optical measuring methods and system
SAMSUNG ELECTRONICS CO LTD29 citations92
US9255789B2Feb 9, 2016
Method for measuring thickness of object
SAMSUNG ELECTRONICS CO LTD3 citations65
US7197426B2Mar 27, 2007
Method and apparatus for measuring thickness of metal layer
SAMSUNG ELECTRONICS CO LTD3 citations60
US9593940B2Mar 14, 2017
Optical measuring methods and apparatus
SAMSUNG ELECTRONICS CO LTD1 citations50
US10410937B2Sep 10, 2019
Optical measuring method for semiconductor wafer including a plurality of patterns and method of manufacturing semiconductor device using optical measurement
SAMSUNG ELECTRONICS CO LTD0 citations37