Inventor
TAMAKI REIJI
JP7 patents
Patents
7 patentsUS4731516AMar 15, 1988
Laser polishing semiconductor wafer
MITSUBISHI ELECTRIC CORP56 citations95
US5481137AJan 2, 1996
Semiconductor device with improved immunity to contact and conductor defects
MITSUBISHI ELECTRIC CORP20 citations91
US4983547AJan 8, 1991
Method of forming a silicide film
MITSUBISHI ELECTRIC CORP10 citations73
US4942451AJul 17, 1990
Semiconductor device having improved antireflection coating
MITSUBISHI ELECTRIC CORP16 citations73
US4896204AJan 23, 1990
Semiconductor device and method of manufacturing thereof
MITSUBISHI ELECTRIC CORP13 citations73
US4884120ANov 28, 1989
Semiconductor device and method for making the same
MITSUBISHI ELECTRIC CORP11 citations73
US5260604ANov 9, 1993
Semiconductor device with improved immunity to contact and conductor defects
MITSUBISHI ELECTRIC CORP6 citations72