Inventor
MIURA ATSUYASU
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MIURA ATSUYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
12 patentsUS11521865B2Dec 6, 2022
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD4 citations70
US9956594B2May 1, 2018
Substrate processing method
SCREEN HOLDINGS CO LTD2 citations68
US10186435B2Jan 22, 2019
Chemical liquid preparation method of preparing a chemical liquid for substrate processing, chemical liquid preparation unit preparing a chemical liquid for substrate processing, and substrate processing system
SCREEN HOLDINGS CO LTD6 citations67
US10639683B2May 5, 2020
Recovery piping cleaning method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations60
US12337289B2Jun 24, 2025
Chemical liquid preparation device, and substrate processing device
SCREEN HOLDINGS CO LTD0 citations59
US12064739B2Aug 20, 2024
Chemical liquid preparation device, and substrate processing device
SCREEN HOLDINGS CO LTD0 citations59
US11439967B2Sep 13, 2022
Chemical liquid preparation method, chemical liquid preparation device, and substrate processing device
SCREEN HOLDINGS CO LTD0 citations59
US10786836B2Sep 29, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations39
US10658203B2May 19, 2020
Substrate processing apparatus and processing cup cleaning method
SCREEN HOLDINGS CO LTD0 citations39
US10622225B2Apr 14, 2020
Substrate processing apparatus and nozzle cleaning method
SCREEN HOLDINGS CO LTD0 citations39
US10199243B2Feb 5, 2019
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations39
US10854481B2Dec 1, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations36