Inventor
TSUJIKAWA HIROKI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “TSUJIKAWA HIROKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
10 patentsUS11521865B2Dec 6, 2022
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD4 citations70
US10639683B2May 5, 2020
Recovery piping cleaning method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations60
US12337289B2Jun 24, 2025
Chemical liquid preparation device, and substrate processing device
SCREEN HOLDINGS CO LTD0 citations59
US12064739B2Aug 20, 2024
Chemical liquid preparation device, and substrate processing device
SCREEN HOLDINGS CO LTD0 citations59
US11439967B2Sep 13, 2022
Chemical liquid preparation method, chemical liquid preparation device, and substrate processing device
SCREEN HOLDINGS CO LTD0 citations59
US10290511B2May 14, 2019
Substrate treatment apparatus and substrate treatment method
SCREEN HOLDINGS CO LTD1 citations58
US10786836B2Sep 29, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations39
US10658203B2May 19, 2020
Substrate processing apparatus and processing cup cleaning method
SCREEN HOLDINGS CO LTD0 citations39
US10622225B2Apr 14, 2020
Substrate processing apparatus and nozzle cleaning method
SCREEN HOLDINGS CO LTD0 citations39
US10199243B2Feb 5, 2019
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations39