Inventor
TSUCHIHASHI Yuya
JP7 patents
Patents
7 patentsUS11521865B2Dec 6, 2022
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD4 citations70
US10639683B2May 5, 2020
Recovery piping cleaning method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations60
US10843223B2Nov 24, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations58
US10786836B2Sep 29, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations39
US10658203B2May 19, 2020
Substrate processing apparatus and processing cup cleaning method
SCREEN HOLDINGS CO LTD0 citations39
US10622225B2Apr 14, 2020
Substrate processing apparatus and nozzle cleaning method
SCREEN HOLDINGS CO LTD0 citations39
US10199243B2Feb 5, 2019
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations39