Inventor
TAKI AKIHIKO
JP7 patents
Patents
7 patentsUS10777404B2Sep 15, 2020
Substrate processing apparatus
SCREEN HOLDINGS CO LTD4 citations70
US10720320B2Jul 21, 2020
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD2 citations70
US10192771B2Jan 29, 2019
Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method
SCREEN HOLDINGS CO LTD4 citations69
US11031235B2Jun 8, 2021
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations60
US11195731B2Dec 7, 2021
Substrate processing device, substrate processing method, and substrate processing system
SCREEN HOLDINGS CO LTD0 citations51
US10199243B2Feb 5, 2019
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations39
US9892955B2Feb 13, 2018
Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method
SCREEN HOLDINGS CO LTD0 citations38