Inventor
SAITO YUKIYOSHI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “SAITO YUKIYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS12444623B2Oct 14, 2025
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD0 citations56
US10236196B2Mar 19, 2019
Substrate processing system
TOKYO ELECTRON LTD1 citations51
US9305819B2Apr 5, 2016
Substrate processing system
TOKYO ELECTRON LTD1 citations51
US12444622B2Oct 14, 2025
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD0 citations49
US10290518B2May 14, 2019
Substrate liquid processing apparatus
TOKYO ELECTRON LTD0 citations39