Inventor
HENCH JOHN
US12 patents
⚠️ This page may combine multiple inventors who share the name “HENCH JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
7 patentsUS9494535B2Nov 15, 2016
Scatterometry-based imaging and critical dimension metrology
KLA TENCOR CORP23 citations92
US10545104B2Jan 28, 2020
Computationally efficient X-ray based overlay measurement
KLA TENCOR CORP10 citations83
US10481111B2Nov 19, 2019
Calibration of a small angle X-ray scatterometry based metrology system
KLA TENCOR CORP11 citations81
US10983227B2Apr 20, 2021
On-device metrology using target decomposition
KLA TENCOR CORP3 citations72
US11073487B2Jul 27, 2021
Methods and systems for characterization of an x-ray beam with high spatial resolution
KLA TENCOR CORP3 citations71
US10794839B2Oct 6, 2020
Visualization of three-dimensional semiconductor structures
KLA TENCOR CORP4 citations69
US10677586B2Jun 9, 2020
Phase revealing optical and X-ray semiconductor metrology
KLA TENCOR CORP0 citations51
KLA TENCOR TECH CORP
2 patentsUS7716003B1May 11, 2010
Model-based measurement of semiconductor device features with feed forward use of data for dimensionality reduction
KLA TENCOR TECH CORP23 citations92
US7826072B1Nov 2, 2010
Method for optimizing the configuration of a scatterometry measurement system
KLA TENCOR TECH CORP6 citations62