Inventor
OTSUBO KYO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “OTSUBO KYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA MEMORY CORP
4 patentsUS10882082B2Jan 5, 2021
Freeze cleaning apparatus
TOSHIBA MEMORY CORP0 citations59
US11185895B2Nov 30, 2021
Substrate processing method, substrate processing apparatus, and composite processing apparatus
TOSHIBA MEMORY CORP0 citations49
US10692715B2Jun 23, 2020
Method for cleaning substrate and substrate processing apparatus
TOSHIBA MEMORY CORP0 citations49
US10486203B2Nov 26, 2019
Substrate production method, substrate processing apparatus, and substrate production system
TOSHIBA MEMORY CORP0 citations39