Inventor

CHANG SHENGWU

US35 patents

⚠️ This page may combine multiple inventors who share the name “CHANG SHENGWU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHANG SHENGWU

VARIAN SEMICONDUCTOR EQUIPMENT

Indirectly heated cathode ion source

Technique for uniformity tuning in an ion implanter system

Apparatus and techniques for controlling ion implantation uniformity

Technique for uniformity tuning in an ion implanter system

Ion beam implant current, spot width and position tuning

High voltage insulator for preventing instability in an ion implanter due to triple-junction breakdown

Moveable current sensor for increasing ion beam utilization during ion implantation

Electron confinement inside magnet of ion implanter

Technique for tuning an ion implanter system

Weakening focusing effect of acceleration-deceleration column of ion implanter

Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation

Apparatus and method to control ion beam current

Apparatus for treating ion beam

Hybrid electrostatic lens for improved beam transmission

Apparatus and techniques for controlling ion implantation uniformity

Bias electrodes for tandem accelerator

APPLIED MATERIALS INC

Apparatus and method for controlling ion beam properties using electrostatic filter

System and method for improved beam current from an ion source

System and method for improved beam current from an ion source

High-current ion implanter and method for controlling ion beam using high-current ion implanter

Electrostatic filter and ion implanter having asymmetric electrostatic configuration

Integrated gas box and ion source

Apparatus and method for controlling ion beam using electrostatic filter

Electostatic filter and method for controlling ion beam properties using electrostatic filter

Electostatic filter and method for controlling ion beam using electostatic filter

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Conductive beam optic containing internal heating element

Apparatus and method for controlling ion beam properties using energy filter

Conductive beam optics for reducing particles in ion implanter

Cold stripper for high energy ion implanter with tandem accelerator

Apparatus and method for improved ion beam current

Controlling an ion beam in a wide beam current operation range

Source housing assembly for controlling ion beam extraction stability and ion beam current

Method and apparatus for generating high current negative hydrogen ion beam

CHANG SHENGWU

Platen control

Ion beam tuning