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Inventor
WOO HYUNG JE
US
5 patents
⚠️ This page may combine multiple inventors who share the name “WOO HYUNG JE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patents
US11133212B2
Sep 28, 2021
High temperature electrostatic chuck
APPLIED MATERIALS INC
2 citations
72
US11821082B2
Nov 21, 2023
Reduced defect deposition processes
APPLIED MATERIALS INC
0 citations
56
SEMES CO LTD
2 patents
US10103018B2
Oct 16, 2018
Apparatus for treating substrate
SEMES CO LTD
5 citations
71
US9978567B2
May 22, 2018
Apparatus and method of treating a substrate
SEMES CO LTD
0 citations
36
KIM HYUNG JOON
1 patent
US9496121B2
Nov 15, 2016
Antenna units, substrate treating apparatuses including the same, and substrate treating methods using the apparatuses
KIM HYUNG JOON
3 citations
70