Inventor
TAVAKKOLI KERMANI GHARIEHALI AMIR
US15 patents
Patents
15 patentsUS11281095B2Mar 22, 2022
Frame curing template and system and method of using the frame curing template
CANON KK3 citations71
US10935883B2Mar 2, 2021
Nanoimprint template with light blocking material and method of fabrication
CANON KK6 citations71
US11774849B2Oct 3, 2023
Method and system for adjusting edge positions of a drop pattern
CANON KK0 citations61
US12158698B2Dec 3, 2024
Frame curing system for extrusion control
CANON KK0 citations60
US11243466B2Feb 8, 2022
Template with mass velocity variation features, nanoimprint lithography apparatus that uses the template, and methods that use the template
CANON KK0 citations60
US11181819B2Nov 23, 2021
Frame curing method for extrusion control
CANON KK1 citations60
US11194247B2Dec 7, 2021
Extrusion control by capillary force reduction
CANON KK0 citations59
US12130549B2Oct 29, 2024
Method of manufacturing a template
CANON KK0 citations50
US12085852B2Sep 10, 2024
Template, method of forming a template, apparatus and method of manufacturing an article
CANON KK0 citations50
US12009233B2Jun 11, 2024
Imprint lithography methods comprising multiple printheads configured to generate a fluid droplet pattern with a drop exclusion zone
CANON KK0 citations50
US11762295B2Sep 19, 2023
Fluid droplet methodology and apparatus for imprint lithography
CANON KK0 citations50
US11541577B2Jan 3, 2023
Template apparatus and methods of using the same
CANON KK0 citations50
US11429022B2Aug 30, 2022
Systems and methods for curing a shaped film
CANON KK0 citations50
US11373861B2Jun 28, 2022
System and method of cleaning mesa sidewalls of a template
CANON KK0 citations50
US10976657B2Apr 13, 2021
System and method for illuminating edges of an imprint field with a gradient dosage
CANON KK0 citations50