Inventor
TACHINO YUSUKE
JP4 patents
Patents
4 patentsUS9640448B2May 2, 2017
Film forming method, film forming apparatus, and storage medium
TOKYO ELECTRON LTD463 citations96
US11486043B2Nov 1, 2022
Metal contamination prevention method and apparatus, and substrate processing method using the same and apparatus therefor
TOKYO ELECTRON LTD0 citations60
US9422624B2Aug 23, 2016
Heat treatment method
TOKYO ELECTRON LTD0 citations50
US9758867B2Sep 12, 2017
Method of controlling gas supply apparatus and substrate processing system
TOKYO ELECTRON LTD0 citations39