Inventor
SHIOSAKI MASAHIRO
JP3 patents
Patents
3 patentsUS11221557B2Jan 11, 2022
Resist composition, method of forming resist pattern, compound, and acid generator
TOKYO OHKA KOGYO CO LTD8 citations83
US11762288B2Sep 19, 2023
Resist composition, method of forming resist pattern, and acid diffusion-controlling agent
TOKYO OHKA KOGYO CO LTD0 citations41
US10414918B2Sep 17, 2019
Method of preparing polymer compound
TOKYO OHKA KOGYO CO LTD0 citations39