Inventor
MICHIBAYASHI NOBUHIRO
JP5 patents
Patents
5 patentsUS11256169B2Feb 22, 2022
Resist composition, and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD7 citations71
US11780946B2Oct 10, 2023
Alternating copolymer, method of producing alternating copolymer, method of producing polymeric compound, and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations48
US11693316B2Jul 4, 2023
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations48
US12498635B2Dec 16, 2025
Resist composition, method of forming resist pattern, and compound
TOKYO OHKA KOGYO CO LTD0 citations47
US11762288B2Sep 19, 2023
Resist composition, method of forming resist pattern, and acid diffusion-controlling agent
TOKYO OHKA KOGYO CO LTD0 citations41