Inventor
TAKI MASAKAZU
JP26 patents
⚠️ This page may combine multiple inventors who share the name “TAKI MASAKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
21 patentsUS6287980B1Sep 11, 2001
Plasma processing method and plasma processing apparatus
MITSUBISHI ELECTRIC CORP186 citations98
US6076483AJun 20, 2000
Plasma processing apparatus using a partition panel
MITSUBISHI ELECTRIC CORP82 citations96
US5733405AMar 31, 1998
Plasma processing apparatus
MITSUBISHI ELECTRIC CORP86 citations95
US4988922AJan 29, 1991
Power supply for microwave discharge light source
MITSUBISHI ELECTRIC CORP41 citations95
US6167835B1Jan 2, 2001
Two chamber plasma processing apparatus
MITSUBISHI ELECTRIC CORP43 citations92
US6020570AFeb 1, 2000
Plasma processing apparatus
MITSUBISHI ELECTRIC CORP23 citations92
US5359177AOct 25, 1994
Microwave plasma apparatus for generating a uniform plasma
MITSUBISHI ELECTRIC CORP42 citations92
US5115168AMay 19, 1992
Power supply for microwave discharge light source
MITSUBISHI ELECTRIC CORP38 citations92
US5048048ASep 10, 1991
Gas laser device
MITSUBISHI ELECTRIC CORP49 citations92
US4890294ADec 26, 1989
Plasma apparatus
MITSUBISHI ELECTRIC CORP25 citations92
US4571479AFeb 18, 1986
Welding machine with automatic seam tracking
MITSUBISHI ELECTRIC CORP33 citations92
US8378674B2Feb 19, 2013
Magnetic field detection device
MITSUBISHI ELECTRIC CORP18 citations83
US7786725B2Aug 31, 2010
Magnetic field detection apparatus for detecting an external magnetic field applied to a magnetoresistance effect element, and method of adjusting the same
MITSUBISHI ELECTRIC CORP9 citations83
US5144199ASep 1, 1992
Microwave discharge light source device
MITSUBISHI ELECTRIC CORP13 citations74
US10093566B2Oct 9, 2018
Water treatment apparatus and water treatment method
MITSUBISHI ELECTRIC CORP2 citations71
US9957170B2May 1, 2018
Water treatment device and water treatment method
MITSUBISHI ELECTRIC CORP2 citations71
US8053254B2Nov 8, 2011
Apparatus for forming thin film and method of manufacturing semiconductor film
MITSUBISHI ELECTRIC CORP4 citations62
US7733210B2Jun 8, 2010
Magnetic field detector and manufacturing method thereof
MITSUBISHI ELECTRIC CORP3 citations60
US6756312B2Jun 29, 2004
Method of fabricating a semiconductor device including time-selective etching process
MITSUBISHI ELECTRIC CORP1 citations51
US9868655B1Jan 16, 2018
Water treatment apparatus and water treatment method
MITSUBISHI ELECTRIC CORP1 citations50
US10035718B2Jul 31, 2018
Water treatment apparatus and water treatment method
MITSUBISHI ELECTRIC CORP0 citations39
RENESAS TECH CORP
3 patentsUS6929712B2Aug 16, 2005
Plasma processing apparatus capable of evaluating process performance
RENESAS TECH CORP24 citations89
US7773408B2Aug 10, 2010
Nonvolatile memory device
RENESAS TECH CORP8 citations84
US7790478B2Sep 7, 2010
Manufacturing method of semiconductor integrated circuit device
RENESAS TECH CORP3 citations58