Inventor
SARUBBI THOMAS R
US11 patents
⚠️ This page may combine multiple inventors who share the name “SARUBBI THOMAS R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OCG MICROELECTRONIC MATERIALS
8 patentsUS5494785AFeb 27, 1996
High ortho-ortho bonded novolak binder resins and their use in a process for forming positive resist patterns
OCG MICROELECTRONIC MATERIALS15 citations81
US5473045ADec 5, 1995
High ortho-ortho bonded novolak binder resins and their use in radiation-sensitive compositions
OCG MICROELECTRONIC MATERIALS14 citations81
US5413894AMay 9, 1995
High ortho-ortho bonded novolak binder resins and their use in radiation-sensitive compositions
OCG MICROELECTRONIC MATERIALS12 citations73
US5350827ASep 27, 1994
Selected structurally defined novolak binder resins and their use in radiation-sensitive compositions
OCG MICROELECTRONIC MATERIALS1 citations62
US5306594AApr 26, 1994
Radiation-sensitive compositions using novolak resins made from a substituted bis(hydroxyphenyl)methane and a bis-(methylol)-cresol
OCG MICROELECTRONIC MATERIALS3 citations62
US5024921AJun 18, 1991
Thermally stable light-sensitive compositions with o-quinone diazide and phenolic resin used in a method of forming a positive photoresist image
OCG MICROELECTRONIC MATERIALS5 citations62
US5151339ASep 29, 1992
Photoresist composition containing diazoquinone photosensitizer and novalak resin characterized by the complete and selective removal of dimeric species from the novolak resin
OCG MICROELECTRONIC MATERIALS6 citations61
US5132376AJul 21, 1992
Process for selective removal of dimeric species from phenolic polymers
OCG MICROELECTRONIC MATERIALS5 citations61